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Wafer Heating Stage

CR-LEPS-002-WFHEATER

Wafer Heating Stage

Wafer Heating Stage

CR-LEPS-002-WFHEATER

Category: Temperature Controlled Stages

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  • 2 '', 3'', 4'' wafer heating stage 
  • Stand along use 
  • Microscope adoptable 
  • Elipsometry adoptable

Model

CR-LEPS-001-WFHEATER-2

CR-LEPS-001-WFHEATER-3

CR-LEPS-001-WFHEATER-4

 

Overall Dimensions (DxH)

160X16mm

160X16mm

200X16mm

 

Sample Area

2 inches (50,8mm)

3 inches(76,2mm)

4 inches(100 mm)

 

Wafer Pocket Dept

430µm

430µm

430µm

 

Wafer Pocket Material

Graphite

                      Graphite

Graphite

 

(Optional SiC Coated Graphite)

 

Maximum Temperature

200°C

200°C

200°C

 

Temperature Uniformity

<10%

<10%

<10%

 

Optional Heating

                                                                                  400°C

 

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